Semiconductor- and LED industry
Sensitive processes
Stable flow measurement and control improves process conditions and leads to higher product quality for wafers and screens.
- Deposition of protective layers on wafers
- Chemical vapour deposition (MOCVD)
- Atomic layer deposition (ALD)
Flow control
As an exclusive Bronkhorst partner, we are able to offer highly innovative, metal-sealed flow instruments for direct liquid injection systems on the Austrian market. These play a decisive role in the production of LEDs using the MOCVD process.
Flow measurement
Our devices can be used for flow measurement of liquids, gases and vaporization. It is particularly challenging for our customers to measure supercritical fluids such as carbon dioxide when they are in the transition phase between a liquid and gaseous state. Our Coriolis mass flow meters are suitable for this application.
